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Investigation of inversion, accumulation and junctionless mode bulk Germanium FinFETs

机译:研究反转,积累和无结模式体锗FinFET

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摘要

The characteristic performance of n-type and p-type inversion (IM) mode, accumulation (AC) mode and junctionless (JL) mode, bulk Germanium FinFET device with 3-nm gate length (LG) are demonstrated by using 3-D quantum transport device simulation. The simulated bulk Ge FinFET device exhibits favorable short channel characteristics, including drain-induced barrier lowering (DIBL<10mV/V), sub threshold slope (SS∼64mV/dec.). Electron density distributions in ON-state and OFF-state also show that the simulated devices have large ION/IOFF ratios. Homogenous source/drain doping is maintained and only the channel doping is varied among different operating modes. Also, a constant threshold voltage |VTH|∼0.31V is maintained. Moreover, the calculated quantum capacitance (CQ) values of the Ge nanowire emphasizes the importance of quantum confinement effects (QCE) on the performance of the ultra-scaled devices.
机译:通过使用3-D量子论证明了具有3 nm栅极长度(LG)的体锗FinFET器件的n型和p型反转(IM)模式,累积(AC)模式和无结(JL)模式的特性性能运输设备模拟。模拟的体Ge FinFET器件具有良好的短沟道特性,包括漏极引起的势垒降低(DIBL <10mV / V),亚阈值斜率(SS〜64mV / dec。)。处于开态和关态的电子密度分布也表明,模拟器件具有较大的ION / IOFF比。维持均匀的源极/漏极掺杂,并且在不同的操作模式之间仅改变沟道掺杂。而且,保持恒定的阈值电压| VTH |〜0.31V。而且,计算出的Ge纳米线的量子电容(CQ)值强调了量子限制效应(QCE)对超大规模器件性能的重要性。

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